Deposition of Functional Coatings from an Acetylene-Containing Plasma at Atmospheric Pressure
Title:
Deposition of Functional Coatings from an Acetylene-Containing Plasma at Atmospheric Pressure
Author:
Plevako, F. V. Gorbatov, S. V. Davidovich, P. A. Prikhod′ko, E. M. Shushkov, S. V. Krul′, L. P. Butovskaya, G. V. Shakhno, O. V. Gusakova, S. V. Korolik, O. V. Mazanik, A. V.