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Journal description
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Details for article 22 of 24 found articles
| Title: |
Opportunities for materials modeling in microelectronics: Programmed rate chemical vapor deposition |
| Author: |
Cale, Timothy S. Richards, David F. Yang, Daewon |
| Appeared in: |
Journal of computer-aided materials design |
| Paging: | Volume 6 () nr. 2-3 pages 283-309 |
| Year: |
2004-09-29 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 24 found articles
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