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  Design and analysis of a MEMS pressure sensor with a bossed membrane and ancillary bi-functional frog arm structure for low pressure measurement
 
 
Title: Design and analysis of a MEMS pressure sensor with a bossed membrane and ancillary bi-functional frog arm structure for low pressure measurement
Author: Sahay, Rohan
Jindal, Sumit Kumar
Appeared in: Journal of computational electronics
Paging: Volume 20 () nr. 2 pages 1012-1019
Year: 2021-02-24
Contents:
Publisher: Springer US, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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