Structural, Optical, and Photoelectric Properties of Silicon Implanted with Indium and Antimony Ions and Subjected to Pulsed Annealing
Title:
Structural, Optical, and Photoelectric Properties of Silicon Implanted with Indium and Antimony Ions and Subjected to Pulsed Annealing
Author:
Batalov, R. I. Bazarov, V. V. Nuzhdin, V. I. Valeev, V. F. Novikov, H. A. Shustov, V. A. Galkin, K. N. Chistokhin, I. B. Komarov, F. F. Milchanin, O. V. Parkhomenko, I. N.