Attenuated Total Reflection Spectra of Nitrided SiO2/Si Structures
Titel:
Attenuated Total Reflection Spectra of Nitrided SiO2/Si Structures
Auteur:
Odzhaev, V. B. Pyatlitski, A. N. Prosolovich, V. S. Kovalchuk, N. S. Soloviev, Ya. A. Zhygulin, D. V. Shestovsky, D. V. Yankovski, Yu. N. Brinkevich, D. I.