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                                       Details for article 4 of 22 found articles
 
 
  FERROMAGNETIC-ENHANCED LOW-PRESSURE INDUCTIVE DISCHARGE FOR PLASMA PROCESSING
 
 
Title: FERROMAGNETIC-ENHANCED LOW-PRESSURE INDUCTIVE DISCHARGE FOR PLASMA PROCESSING
Author: Isupov, M. V.
Pinaev, V. A.
Appeared in: Journal of applied mechanics and technical physics
Paging: Volume 64 () nr. 5 pages 757-766
Year: 2024-01-15
Contents:
Publisher: Pleiades Publishing, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 4 of 22 found articles
 
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