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Journal description
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Details for article 17 of 19 found articles
| Title: |
The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating |
| Author: |
Burke, L. D. Naser, N. S. Sharna, R. |
| Appeared in: |
Journal of applied electrochemistry |
| Paging: | Volume 38 (2007) nr. 3 pages 377-384 |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Springer Netherlands, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 19 found articles
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