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Journal description
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Details for article 15 of 20 found articles
| Title: |
PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS |
| Author: |
Helhel, S. Ellingboe, A. R. Cerezci, O. Gaman, C. |
| Appeared in: |
International journal of infrared and millimeter waves |
| Paging: | Volume 27 () nr. 11 pages 1497-1515 |
| Year: |
2007-05-08 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 20 found articles
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