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Angular Distributions during Magnetron Sputtering of Polycrystalline Mg, Al, Si, Ti, Cr, Cu, Zn, Ge, Zr, Nb, Mo, Ag, In, Sn, W, Pt, Au, and Bi Targets
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| Title: |
Angular Distributions during Magnetron Sputtering of Polycrystalline Mg, Al, Si, Ti, Cr, Cu, Zn, Ge, Zr, Nb, Mo, Ag, In, Sn, W, Pt, Au, and Bi Targets
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| Author: |
Rogov, A. V.
Kapustin, Yu. V.
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| Appeared in: |
Instruments and experimental techniques
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| Paging: |
Volume 63 () nr. 5 pages 776-781 |
| Year: |
2020-09-23
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| Publisher: |
Pleiades Publishing, Moscow
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| Source file: |
Elektronische Wetenschappelijke Tijdschriften
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Journal description