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Journal description
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Details for article 5 of 26 found articles
| Title: |
A magnetron sputtering device with generation of pulsed beams of high-energy gas atoms |
| Author: |
Metel, A. S. Grigoriev, S. N. Volosova, M. A. Melnik, Yu. A. |
| Appeared in: |
Instruments and experimental techniques |
| Paging: | Volume 60 (2017) nr. 2 pages 290-296 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 26 found articles
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