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Journal description
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Details for article 11 of 23 found articles
| Title: |
A power supply for magnetron sputtering systems |
| Author: |
Sochugov, N. S. Oskirko, V. O. Spirin, R. E. |
| Appeared in: |
Instruments and experimental techniques |
| Paging: | Volume 56 (2013) nr. 2 pages 178-184 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 23 found articles
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