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Journal description
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Details for article 21 of 22 found articles
| Title: |
Thermodynamic simulation of silicon deposition from the gas phase of Si-Cl-H system |
| Author: |
Chernyavsky, L. I. Titov, V. A. Sysoev, S. V. Ryzhenkov, S. V. |
| Appeared in: |
Inorganic materials |
| Paging: | Volume 45 (2009) nr. 5 pages 463-467 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 22 found articles
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