Direct One-Step Plasma-Chemical Synthesis of Nanostructured β-Ga2O3–GaN Thin Films of Various Compositions
Titel:
Direct One-Step Plasma-Chemical Synthesis of Nanostructured β-Ga2O3–GaN Thin Films of Various Compositions
Auteur:
Mochalov, L. A. Kudryashov, M. A. Vshivtsev, M. A. Kudryashova, Yu. P. Prokhorov, I. O. Knyazev, A. V. Almaev, A. V. Yakovlev, N. N. Chernikov, E. V. Erzakova, N. N.