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                                       Details for article 10 of 13 found articles
 
 
  Plasma etching: From micro- to nanoelectronics
 
 
Title: Plasma etching: From micro- to nanoelectronics
Author: Shamiryan, D.
Paraschiv, V.
Boullart, W.
Baklanov, M. R.
Appeared in: High energy chemistry
Paging: Volume 43 (2009) nr. 3 pages 204-212
Year: 2009
Contents:
Publisher: SP MAIK Nauka/Interperiodica, Dordrecht
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 10 of 13 found articles
 
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