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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 10 of 13 found articles
| Title: |
Plasma etching: From micro- to nanoelectronics |
| Author: |
Shamiryan, D. Paraschiv, V. Boullart, W. Baklanov, M. R. |
| Appeared in: |
High energy chemistry |
| Paging: | Volume 43 (2009) nr. 3 pages 204-212 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 13 found articles
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