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  Behavior of organochlorine impurities in the process of plasma-enhanced synthesis of trichlorosilane
 
 
Title: Behavior of organochlorine impurities in the process of plasma-enhanced synthesis of trichlorosilane
Author: Gusev, A. V.
Kornev, R. A.
Sukhanov, A. Yu.
Appeared in: High energy chemistry
Paging: Volume 42 (2008) nr. 4 pages 324-325
Year: 2008
Contents:
Publisher: SP MAIK Nauka/Interperiodica, Dordrecht
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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