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Journal description
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Details for article 5 of 17 found articles
| Title: |
Formation of masking pattern by electron beam-induced vapor deposition |
| Author: |
Bruk, M. A. Zhikharev, E. N. Shevchuk, S. L. Volegova, I. A. Spirin, A. V. Teleshov, E. N. Kal’nov, V. A. Maishev, Yu. P. |
| Appeared in: |
High energy chemistry |
| Paging: | Volume 42 (2008) nr. 2 pages 105-112 |
| Year: |
2008 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 17 found articles
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