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                                       Details for article 2 of 15 found articles
 
 
  Behavior of carbon-containing impurities during plasma synthesis of trichlorosilane
 
 
Title: Behavior of carbon-containing impurities during plasma synthesis of trichlorosilane
Author: Gusev, A. V.
Kornev, R. A.
Sukhanov, A. Yu.
Appeared in: High energy chemistry
Paging: Volume 42 (2008) nr. 1 pages 56-58
Year: 2008
Contents:
Publisher: SP MAIK Nauka/Interperiodica, Dordrecht
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 15 found articles
 
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