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Journal description
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Details for article 12 of 64 found articles
| Title: |
Deposition of Films from a Mixture of Hexamethylcyclotrisilazane Vapor and Argon in Inductively Coupled Plasma |
| Author: |
Shayapov, V. R. Chagin, M. N. Kolodin, A. N. Kosinova, M. L. |
| Appeared in: |
Glass physics and chemistry |
| Paging: | Volume 45 () nr. 6 pages 525-531 |
| Year: |
2020-02-11 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 64 found articles
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