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Synthesis and Physicochemical Properties of Nanocrystalline Silicon Carbonitride Films Deposited by Microwave Plasma from Organoelement Compounds |
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Titel: |
Synthesis and Physicochemical Properties of Nanocrystalline Silicon Carbonitride Films Deposited by Microwave Plasma from Organoelement Compounds |
Auteur: |
Fainer, N. I. Kosinova, M. L. Rumyantsev, Yu. M. Maksimovskii, E. A. Kuznetsov, F. A. Kesler, V. G. Kirienko, V. V. Han, Bao-Shan Lu, Cheng |
Verschenen in: |
Glass physics and chemistry |
Paginering: |
Jaargang 31 (2005) nr. 4 pagina's 427-432 |
Jaar: |
2005 |
Inhoud: |
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Uitgever: |
Nauka/Interperiodica, Moscow |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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