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Journal description
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Details for article 10 of 13 found articles
| Title: |
On the nature of defects and mechanism of their formation in thin borophosphosilicate glass layers produced by vapor deposition upon fabrication of integrated circuits |
| Author: |
Vasil’ev, V. Yu. |
| Appeared in: |
Glass physics and chemistry |
| Paging: | Volume 26 () nr. 2 pages 93-103 |
| Year: |
2007-10-22 |
| Contents: | |
| Publisher: |
Nauka/Interperiodica, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 13 found articles
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