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Journal description
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Details for article 3 of 10 found articles
| Title: |
Development of Polishing Materials Based on Nonwoven Matrices and Polyesterurethane Solutions for Chemical Mechanical Planarization of Dielectric Layers of Semiconductor Wafers |
| Author: |
Bokova, E. S. Terashkevich, D. I. Plotnikov, D. S. Kovalenko, G. M. |
| Appeared in: |
Fibre chemistry |
| Paging: | Volume 56 () nr. 6 pages 396-400 |
| Year: |
2025-07-11 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 10 found articles
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