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Fabrication of a three-layer SU-8 mould with inverted T-shaped cavities based on a sacrificial photoresist layer technique |
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Titel: |
Fabrication of a three-layer SU-8 mould with inverted T-shaped cavities based on a sacrificial photoresist layer technique |
Auteur: |
Liu, Junshan Zhang, Dong Sha, Baoyong Yin, Penghe Xu, Zheng Liu, Chong Wang, Liding Xu, Feng Wang, Lin |
Verschenen in: |
Biomedical microdevices |
Paginering: |
Jaargang 16 (2014) nr. 5 pagina's 655-660 |
Jaar: |
2014 |
Inhoud: |
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Uitgever: |
Springer US, Boston |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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