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Journal description
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Details for article 9 of 22 found articles
| Title: |
Design, microfabrication and analysis of polysilicon thin layers for MEMS vibrating structures |
| Author: |
Voicu, Rodica-Cristina Gavrila, Raluca Obreja, Alexandru Cosmin Baracu, Angela-Mihaela Dinescu, Adrian Müller, Raluca |
| Appeared in: |
Analog integrated circuits and signal processing |
| Paging: | Volume 82 (2015) nr. 3 pages 611-620 |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 22 found articles
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