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                                       Details for article 2 of 22 found articles
 
 
  Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process
 
 
Title: Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process
Author: Grixti, Ryan
Grech, Ivan
Casha, Owen
Darmanin, Jean Marie
Gatt, Edward
Micallef, Joseph
Appeared in: Analog integrated circuits and signal processing
Paging: Volume 82 (2015) nr. 3 pages 599-610
Year: 2015
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 22 found articles
 
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