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                                       Details for article 17 of 22 found articles
 
 
  Nanomechanical and nanotribological characterization of a MEMS micromembrane supported by two folded hinges
 
 
Title: Nanomechanical and nanotribological characterization of a MEMS micromembrane supported by two folded hinges
Author: Pustan, Marius
Dudescu, Cristian
Birleanu, Corina
Appeared in: Analog integrated circuits and signal processing
Paging: Volume 82 (2015) nr. 3 pages 627-635
Year: 2015
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 17 of 22 found articles
 
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