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                                       Details for article 5 of 7 found articles
 
 
  Modeling and characterization of three kinds of MEMS resonators fabricated with a thick polysilicon technology
 
 
Title: Modeling and characterization of three kinds of MEMS resonators fabricated with a thick polysilicon technology
Author: Paci, D.
Mastrangeli, M.
Nannini, A.
Pieri, F.
Appeared in: Analog integrated circuits and signal processing
Paging: Volume 48 (2006) nr. 1 pages 41-47
Year: 2006
Contents:
Publisher: Kluwer Academic Publishers, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 7 found articles
 
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