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Journal description
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Details for article 9 of 22 found articles
| Title: |
Influence of AlN/ScAlN piezoelectric multilayer on the electromechanical coupling of FBAR |
| Author: |
Yang, Qi-Wei Lin, Re-Ching Sun, Shih-Jye |
| Appeared in: |
Micro and nanostructures |
| Paging: | Volume 174 () nr. C pages p. |
| Year: |
2023 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 22 found articles
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