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Research on the effect of gate etching depth on the performance of GaN-based HEMTs under medium source-drain etching |
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Titel: |
Research on the effect of gate etching depth on the performance of GaN-based HEMTs under medium source-drain etching |
Auteur: |
Li, Jialin Yin, Yian Liao, Fengbo Lian, Mengxiao Zhang, Xichen Zhang, Keming Xie, Yafang Wu, You Zou, Bingzhi Zhang, Zhixiang Li, Jingbo |
Verschenen in: |
Micro and nanostructures |
Paginering: |
Jaargang 168 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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