Enhancement of electrical properties of morphotropic phase boundary in Hf1-xZrxO2 films by integrating Mo electrode and TiN interlayer for DRAM capacitors
Titel:
Enhancement of electrical properties of morphotropic phase boundary in Hf1-xZrxO2 films by integrating Mo electrode and TiN interlayer for DRAM capacitors
Auteur:
Park, Ju Yong Choi, Hyojun Lee, Jaewook Yang, Kun Lee, Sun Young Han, Dong In Jeon, Intak Jung, Chang Hwa Lim, Hanjin Lee, Woongkyu Park, Min Hyuk