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Journal description
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Details for article 21 of 41 found articles
| Title: |
Investigation of silicon carbon oxynitride thin film deposited by RF magnetron sputtering |
| Author: |
Aghaei, Abbas Ali Eshaghi, Akbar Ramazani, Mazaher Zabolian, Hossein Abbasi-Firouzjah, Marzieh |
| Appeared in: |
Applied surface science advances |
| Paging: | Volume 19 () nr. C pages p. |
| Year: |
2024 |
| Contents: | |
| Publisher: |
The Author(s) |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 41 found articles
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