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                                       Details for article 28 of 45 found articles
 
 
  Nanoscale tribological aspects of chemical mechanical polishing: A review
 
 
Title: Nanoscale tribological aspects of chemical mechanical polishing: A review
Author: Datta, Debottam
Rai, Himanshu
Singh, Swarnima
Srivastava, Meenakshi
Sharma, Rajesh Kumar
Gosvami, Nitya Nand
Appeared in: Applied surface science advances
Paging: Volume 11 () nr. C pages p.
Year: 2022
Contents:
Publisher: The Authors
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 28 of 45 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands