Control of flow, thermal and pollutant concentration fields by entrainer air streams to improve fresh air quality intake into a semiconductor manufacture/ processing plant
Titel:
Control of flow, thermal and pollutant concentration fields by entrainer air streams to improve fresh air quality intake into a semiconductor manufacture/ processing plant
Auteur:
Liu, Ting-Kao Jamshideasli, Dourna Ramezanpour, Bahareh Ye, Wenwen Zeng, Yi Zargar, Omid Ali Hu, S.C. Khodadadi, J.M. Leggett, Graham