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Plasma-enhanced atomic layer deposition of amorphous Ga2O3 for solar-blind photodetection |
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Title: |
Plasma-enhanced atomic layer deposition of amorphous Ga2O3 for solar-blind photodetection |
Author: |
Fan, Ze-Yu Yang, Min-Ji Fan, Bo-Yu Mavrič, Andraž Pastukhova, Nadiia Valant, Matjaz Li, Bo-Lin Feng, Kuang Liu, Dong-Liang Deng, Guang-Wei Zhou, Qiang Li, Yan-Bo |
Appeared in: |
Journal of electronic science and technology |
Paging: |
Volume 20 () nr. 4 pages p. |
Year: |
2022 |
Contents: |
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Publisher: |
University of Electronic Science and Technology of China |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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