|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 3 of 5 found articles
| Title: |
Effects of material and dimension on TCF, frequency, and Q of radial contour mode AlN-on-Si MEMS resonators |
| Author: |
Ha, Thi Dep |
| Appeared in: |
Journal of electronic science and technology |
| Paging: | Volume 19 () nr. 4 pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
University of Electronic Science and Technology of China |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 5 found articles
| << previous | next >> |