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Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers |
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Titel: |
Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers |
Auteur: |
Watanabe, Shunkai Kurioka, Tomoyuki Chen, Chun-Yi Chang, Tso-Fu Mark Onishi, Akira Chakraborty, Parthojit Machida, Katsuyuki Ito, Hiroyuki Miyake, Yoshihiro Sone, Masato |
Verschenen in: |
Micro and nano engineering |
Paginering: |
Jaargang 23 () nr. C pagina's p. |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
The Authors |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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