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Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of Ø100 mm |
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Titel: |
Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of Ø100 mm |
Auteur: |
Stauffenberg, Jaqueline Reibe, Michael Krötschl, Anja Reuter, Christoph Ortlepp, Ingo Dontsov, Denis Hesse, Steffen Rangelow, Ivo W. Strehle, Steffen Manske, Eberhard |
Verschenen in: |
Micro and nano engineering |
Paginering: |
Jaargang 19 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
The Author(s) |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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