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Journal description
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Details for article 1 of 4 found articles
| Title: |
Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask |
| Author: |
Wu, Meiyi de Marneffe, Jean-François Opsomer, Karl Detavernier, Christophe Delabie, Annelies Naujok, Philipp Caner, Özge Goodyear, Andy Cooke, Mike Saadeh, Qais Soltwisch, Victor Scholze, Frank Philipsen, Vicky |
| Appeared in: |
Micro and nano engineering |
| Paging: | Volume 12 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 4 found articles
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