Ni/4H-SiC interaction and silicide formation under excimer laser annealing for ohmic contact
Titel:
Ni/4H-SiC interaction and silicide formation under excimer laser annealing for ohmic contact
Auteur:
BadalĂ , Paolo RascunĂ , Simone Cafra, Brunella Bassi, Anna Smecca, Emanuele Zimbone, Massimo Bongiorno, Corrado Calabretta, Cristiano La Via, Francesco Roccaforte, Fabrizio Saggio, Mario Franco, Giovanni Messina, Angelo La Magna, Antonino Alberti, Alessandra