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Journal description
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Details for article 43 of 85 found articles
| Title: |
Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process |
| Author: |
Wang, Yingying Cheng, Hongbo Yan, Jing Chen, Ning Yan, Peng Yang, Feng Ouyang, Jun |
| Appeared in: |
Materialia |
| Paging: | Volume 5 () nr. C pages p. |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 43 of 85 found articles
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