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Microstructures and mechanical properties of MoNx isomeric multilayer films with different number of layers deposited by DC magnetron sputtering |
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Titel: |
Microstructures and mechanical properties of MoNx isomeric multilayer films with different number of layers deposited by DC magnetron sputtering |
Auteur: |
Sun, Li Mao, Jiaheng Li, Yucheng Zhou, Quan Yuan, Zhigang Xiong, Xiaoshuang Fang, Qianfeng Gong, Wenbang Lu, Jijun Tang, Lingbo Su, Gongbing Mei, Shunqi |
Verschenen in: |
Materialia |
Paginering: |
Jaargang 28 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
Acta Materialia Inc. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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