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                                       Details for article 37 of 56 found articles
 
 
  Properties of ultrathin molybdenum films for interconnect applications
 
 
Title: Properties of ultrathin molybdenum films for interconnect applications
Author: Founta, Valeria
Soulié, Jean-Philippe
Sankaran, Kiroubanand
Vanstreels, Kris
Opsomer, Karl
Morin, Pierre
Lagrain, Pieter
Franquet, Alexis
Vanhaeren, Danielle
Conard, Thierry
Meersschaut, Johan
Detavernier, Christophe
Van de Vondel, Joris
De Wolf, Ingrid
Pourtois, Geoffrey
Tőkei, Zsolt
Swerts, Johan
Adelmann, Christoph
Appeared in: Materialia
Paging: Volume 24 () nr. C pages p.
Year: 2022
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 37 of 56 found articles
 
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