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Details for article 26 of 60 found articles
| Title: |
Gas phase chemical thermodynamics calculation as a first step for understanding of non-stoichiometric HfOx formation mechanism in ALD |
| Author: |
Litvinova, K.I. Polomskikh, V.S. Shibalova, A.A. Goryachev, A.V. Rudakov, G.A. |
| Appeared in: |
Materials today nano |
| Paging: | Volume 29 () nr. C pages p. |
| Year: |
2025 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 60 found articles
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