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                                       Details for article 26 of 60 found articles
 
 
  Gas phase chemical thermodynamics calculation as a first step for understanding of non-stoichiometric HfOx formation mechanism in ALD
 
 
Title: Gas phase chemical thermodynamics calculation as a first step for understanding of non-stoichiometric HfOx formation mechanism in ALD
Author: Litvinova, K.I.
Polomskikh, V.S.
Shibalova, A.A.
Goryachev, A.V.
Rudakov, G.A.
Appeared in: Materials today nano
Paging: Volume 29 () nr. C pages p.
Year: 2025
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 26 of 60 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands