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                                       Details for article 37 of 37 found articles
 
 
  Top-down fabrication of Si nanotube arrays using nanoimprint lithography and spacer patterning for electronic and optoelectronic applications
 
 
Title: Top-down fabrication of Si nanotube arrays using nanoimprint lithography and spacer patterning for electronic and optoelectronic applications
Author: Sun, Yong-Lie
Jevasuwan, Wipakorn
Fukata, Naoki
Appeared in: Materials today nano
Paging: Volume 28 () nr. C pages p.
Year: 2024
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 37 of 37 found articles
 
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