Boosting non-volatile memory performance with exhalative annealing: A novel approach to low-temperature crystallization of hafnia based ferroelectric
Titel:
Boosting non-volatile memory performance with exhalative annealing: A novel approach to low-temperature crystallization of hafnia based ferroelectric
Auteur:
Lee, Yunseong Kim, Un Jeong Kim, Kihong Yun, Dong-Jin Choe, Duk-hyun Yoo, Sijung Lee, Hyun Jae Nam, Seung-Geol Jo, Sanghyun Park, Yoonsang Kim, Donghoon Kim, Dongmin Kim, Haeryong Shin, Keunwook Nahm, Sahn Heo, Jinseong