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Journal description
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Details for article 28 of 124 found articles
| Title: |
Design of Microstructure Parameters on a Small Multi-Throttle Aerostatic Guideway in Photolithography |
| Author: |
Wen, Zhongpu Wu, Jianwei Xing, Kunpeng Zhang, Yin Li, Jiean Tan, Jiubin |
| Appeared in: |
Engineering |
| Paging: | Volume 7 () nr. 2 pages 226-237 |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Chinese Academy of Engineering |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 124 found articles
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