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                                       Details for article 53 of 79 found articles
 
 
  Rapid extraction of the dielectric constant of atomically thin ZrO2 prepared through atomic layer deposition and atomic layer etching
 
 
Title: Rapid extraction of the dielectric constant of atomically thin ZrO2 prepared through atomic layer deposition and atomic layer etching
Author: Oh, Seongmoo
Lee, Sangmin
Lee, Won-Jun
Cho, Byungchul
Park, Sangjoon
Jung, Jongwan
Appeared in: Surfaces and interfaces
Paging: Volume 59 () nr. C pages p.
Year: 2025
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 53 of 79 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands