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Journal description
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Details for article 3 of 183 found articles
| Title: |
A design of green slurry for copper/cobalt barrier-step chemical mechanical polishing with controlled removal selectivity and dynamic galvanic corrosion inhibition |
| Author: |
Chang, Pengfei Huang, Zisheng Ling, Huiqin Wu, Yunwen Li, Ming Hang, Tao |
| Appeared in: |
Surfaces and interfaces |
| Paging: | Volume 55 () nr. C pages p. |
| Year: |
2024 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 183 found articles
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