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Journal description
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Details for article 135 of 192 found articles
| Title: |
Plasma-chamber wall interaction and its impact on polymer deposition in inductively-coupled C4F8/Ar plasmas |
| Author: |
Park, Woojin Han, Jonggu Park, Sangjun Park, Solee Kim, Jongsik Moon, Se Youn |
| Appeared in: |
Surfaces and interfaces |
| Paging: | Volume 54 () nr. C pages p. |
| Year: |
2024 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 135 of 192 found articles
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