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Effect of substrate temperature on properties of AlN buffer layer grown by remote plasma ALD |
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Titel: |
Effect of substrate temperature on properties of AlN buffer layer grown by remote plasma ALD |
Auteur: |
Zhang, Xiao-Ying Peng, Duan-Chen Han, Jing Ren, Fang-Bin Jiang, Shi-Cong Tseng, Ming-Chun Ruan, Yu-Jiao Zuo, Juan Wu, Wan-Yu Wuu, Dong-Sing Huang, Chien-Jung Lien, Shui-Yang Zhu, Wen-Zhang |
Verschenen in: |
Surfaces and interfaces |
Paginering: |
Jaargang 36 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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