|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 65 of 109 found articles
| Title: |
Low temperature silicon nitride grown by very high frequency (VHF, 162MHz) plasma enhanced atomic layer deposition with floating multi-tile electrode |
| Author: |
Ji, You Jin Kim, Hae In Kim, Ki Hyun Kang, Ji Eun Kim, Doo San Kim, Ki Seok Ellingboe, A.R. Kim, Dong Woo Yeom, Geun Young |
| Appeared in: |
Surfaces and interfaces |
| Paging: | Volume 33 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 65 of 109 found articles
| << previous | next >> |